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Investigation of the solvent-evaporation effect on spin coating of thin films

✍ Scribed by B. T. Chen

Publisher
Society for Plastic Engineers
Year
1983
Tongue
English
Weight
426 KB
Volume
23
Category
Article
ISSN
0032-3888

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## Abstract Equimolar CeO~2~–TiO~2~ multi layer (3–7) thin films were prepared by spin coating technique in different spin speed (1500–4000 rpm), by using sol–gel route. The dependence of deposition conditions on the optical and structural properties of the films was investigated. Scanning electron