𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Investigation of the Si doping effect in β-Ga2O3 films by co-sputtering of gallium oxide and Si

✍ Scribed by Kenichiro Takakura; Suguru Funasaki; Isao Tsunoda; Hidenori Ohyama; Daisuke Takeuchi; Toshiyuki Nakashima; Mutsuo Shibuya; Katsuya Murakami; Eddy Simoen; Cor Claeys

Book ID
116833935
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
368 KB
Volume
407
Category
Article
ISSN
0921-4526

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Structural and optical properties of N-d
Structural and optical properties of N-doped β-Ga2O3 films deposited by RF magnetron sputtering
✍ Yijun Zhang; Jinliang Yan; Qingshan Li; Chong Qu; Liying Zhang; Ting Li 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 930 KB

The N-doped b-Ga 2 O 3 films were grown on Si and quartz substrates by RF magnetron sputtering in different ammonia partial pressure ratios (from 0% to 30%). The influence of ammonia partial pressure ratios and annealing treatment on the optical and structural properties were studied. The microstruc