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Investigation of the damage induced by 200 keV Ge+ ion implantation in 6HSiC

✍ Scribed by Y. Pacaud; W. Skorupa; A. Perez-Rodriguez; G. Brauer; J. Stoemenos; R.C. Barklie


Book ID
113287063
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
385 KB
Volume
112
Category
Article
ISSN
0168-583X

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