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Investigation of structure, thermal and oxygen plasma stability of mesoporous methylsilsesquioxane films by X-ray reflectivity and small angle scattering

✍ Scribed by T.K. Goh; T.K.S. Wong


Book ID
104050201
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
577 KB
Volume
75
Category
Article
ISSN
0167-9317

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