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Investigation of interconnect capacitance characterization using charge-based capacitance measurement (CBCM) technique and three-dimensional simulation

✍ Scribed by Sylvester, D.; Chen, J.C.; Chenming Hu

Book ID: 119775021
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 110 KB
Volume: 33
Category: Article
ISSN: 0018-9200
DOI: 10.1109/4.661210

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