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Investigation of electrochemical macropore formation in silicon

✍ Scribed by L. A. Karachevtseva; O. A. Litvinenko; É. A. Malovichko; E. I. Stronskaya

Book ID
110544283
Publisher
Springer
Year
2000
Tongue
English
Weight
253 KB
Volume
36
Category
Article
ISSN
0040-5760

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## Abstract Nanopores and macropores can be formed electrochemically on p‐type silicon depending on the silicon resistivity and composition of the electrolyte. In order to understand if the structural dimensionality of the porous p‐type Si, either nanopore or macropore formation, depends on the ele