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Investigation of effective-medium models of microscopic surface roughness by spectroscopic ellipsometry

✍ Scribed by Aspnes, D. E.; Theeten, J. B.; Hottier, F.

Book ID
121734685
Publisher
The American Physical Society
Year
1979
Tongue
English
Weight
934 KB
Volume
20
Category
Article
ISSN
1098-0121

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We investigate the applicability of effective medium models for describing the effects of surface roughness on ellipsometric data. The ellipsometric parameters of a model surface composed of truncated spherical bumps on a substrate were calculated and compared to the Bruggeman effective medium theor