𝔖 Bobbio Scriptorium
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Surface roughness effects in ellipsometry: comparison of truncated sphere and effective medium models

✍ Scribed by D. Rönnow; S.K. Anderson; G.A. Niklasson

Book ID
103960019
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
463 KB
Volume
4
Category
Article
ISSN
0925-3467

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✦ Synopsis

We investigate the applicability of effective medium models for describing the effects of surface roughness on ellipsometric data. The ellipsometric parameters of a model surface composed of truncated spherical bumps on a substrate were calculated and compared to the Bruggeman effective medium theory. It is possible to fit the model calculations with the Bruggeman theory. However, the thickness and volume fraction of the effective medium layer describing the surface roughness do not correspond to the physical height and volume fraction of the bumps on the model surface.

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