A new focused ion beam optical system that uses a liquid metal ion source was designed for a new secondary ion time-of-flight mass spectrometry instrument. This optical system consists mainly of two electrostatic lenses. The axial performance of the system was calculated to decide the design values
✦ LIBER ✦
Investigation of E × B mass filters for focused ion beam systems
✍ Scribed by Zheng Cui
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 458 KB
- Volume
- 368
- Category
- Article
- ISSN
- 0168-9002
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