𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Investigation of dual ion beam sputtered transparent conductive Ga-doped ZnO films

✍ Scribed by Pandey, Saurabh Kumar; Pandey, Sushil Kumar; Verma, Shruti; Gupta, M.; Sathe, V.; Mukherjee, Shaibal

Book ID
121601715
Publisher
Springer US
Year
2013
Tongue
English
Weight
689 KB
Volume
24
Category
Article
ISSN
0957-4522

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Helicon-wave-excited plasma sputtering d
Helicon-wave-excited plasma sputtering deposition of Ga-doped ZnO transparent conducting films
✍ Sugiyama, Mutsumi ;Murayama, Akira ;Imao, Takashi ;Saiki, Keita ;Nakanishi, Hisa πŸ“‚ Article πŸ“… 2006 πŸ› John Wiley and Sons 🌐 English βš– 405 KB

## Abstract Sputtering deposition of Ga‐doped ZnO (ZnO:Ga) thin films was carried out using the helicon‐wave‐excited plasma sputtering (HWPS) method. The films sputtered above 150 Β°C had a preferential {0001} orientation. According to the surface‐damage‐free nature, the films having featureless sur