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Investigation of diamond-like carbon formed on PET film by plasma-source ion implantation using C2H2 and CH4

โœ Scribed by M. Yoshida; S. Watanabe; T. Tanaka; T. Takagi; M. Shinohara; J.W. Lee


Book ID
114167200
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
176 KB
Volume
206
Category
Article
ISSN
0168-583X

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Plasma immersion ion implantation with hydrocarbon gases (HC-PIII) leads to both carbon implantation and carbon thin film deposition. The films are diamond-like carbon (DLC), mostly amorphous carbon with hydrogen (a-C:H). In the present review, examples from the literature on the deposition of HC-PI