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Investigation of chemical kinetics and energy transfer in a pulsed microwave H 2 /CH 4 plasma

✍ Scribed by Hassouni, K; Duten, X; Rousseau, A; Gicquel, A


Book ID
121463194
Publisher
Institute of Physics
Year
2001
Tongue
English
Weight
665 KB
Volume
10
Category
Article
ISSN
0963-0252

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## Abstract We report in this study, the growth of silicon carbide nanofibers on silicon substrates covered by Fe thin film catalyst using microwave plasma assisted chemical vapour deposition. The silicon source is the substrate itself. The growth morphology, microstructure, and defects on SiC nano