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Chemical kinetics and energy transfer in moderate pressure H 2 plasmas used in diamond MPACVD processes

✍ Scribed by Hassouni, K; Gicquel, A; Capitelli, M; Loureiro, J

Book ID: 121295371
Publisher: Institute of Physics
Year: 1999
Tongue: English
Weight: 749 KB
Volume: 8
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/8/3/320

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Bibliography%H. Chen, K. Pan, and Y. T.

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