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Chemical vapour deposition of boron carbide from BBr3CH4H2 mixtures in a microwave plasma

✍ Scribed by V Cholet; R Herbin; L Vandenbulcke

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 717 KB
Volume: 188
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(90)90200-w

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