SIMS analysis of InP, GaAs and InGaAs la
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Y. Gao; S. Godefroy; J. L. Benchimol; F. Alaoui; F. Alexandre; K. Rao
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Article
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1990
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John Wiley and Sons
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English
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## Abstract SIMS analysis was applied to the characterization of InP, GaAs and InGaAs grown by chemical beam expitaxy (CBE). It includes the control of purity and doping, and the determination of growth rate and matrix composition. Some important characteristics of CBE growth, such as carbon incorp