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Inversion of thicknesses of multi-layered structures from eddy current testing measurements

โœ Scribed by Huang Ping-jie; Wu Zhao-tong


Book ID
105630494
Publisher
SP Zhejiang University Press
Year
2004
Tongue
English
Weight
519 KB
Volume
5
Category
Article
ISSN
1009-3095

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๐Ÿ“œ SIMILAR VOLUMES


Determination of the thicknesses of gate
โœ J. Gibki; A. Jakubowski; M. Jurczak ๐Ÿ“‚ Article ๐Ÿ“… 1997 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 164 KB

New fromulae for determination of the thicknesses of gate oxide and active layer in SOl structures are presented. The extraction procedure is based on CV measurements of SOl MOSFETs or gated diodes with the parasitic capacitance of the buried oxide taken into account.