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Intrinsic stress evolution in diamond films prepared in a CH4H2NH3 hot filament chemical vapor deposition system

✍ Scribed by Shang, N.G; Lee, C.S; Lin, Z.D; Bello, I; Lee, S.T


Book ID
122188048
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
234 KB
Volume
9
Category
Article
ISSN
0925-9635

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