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Intrinsic mechanical properties of ultra-thin amorphous carbon layers

✍ Scribed by P. Lemoine; J.P. Quinn; P.D. Maguire; J.F. Zhao; J.A. McLaughlin


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
467 KB
Volume
253
Category
Article
ISSN
0169-4332

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Nanoindentation hardness and compressive stress in amorphous carbon nitride thin films prepared by unbalanced magnetron sputter-deposition were studied. The coating hardness and compressive stress were found to be strongly dependent on processing parameters such as substrate bias and nitrogen partia