The deformation mechanisms of GaN thin films obtained by metal-organic chemical vapor deposition (MOCVD) method were studied using nanoindentation with a Berkovich diamond indenter, micro-Raman spectroscopy and the cross-sectional transmission electron microscopy (XTEM) techniques. Due to the sharpn
β¦ LIBER β¦
Fracture mechanisms of thin amorphous carbon films in nanoindentation
β Scribed by Xiaodong Li; Dongfeng Diao; Bharat Bhushan
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 943 KB
- Volume
- 45
- Category
- Article
- ISSN
- 1359-6454
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