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Intersubband transitions for single, double and triple Si -doped GaAs layers

✍ Scribed by Ozturk, Emine; Sokmen, Ismail


Book ID
127209330
Publisher
Institute of Physics
Year
2003
Tongue
English
Weight
439 KB
Volume
36
Category
Article
ISSN
0022-3727

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Due to the complicated artefacts in SIMS depth profiling, SIMS depth resolution is difficult to evaluate. For evaluation of the SIMS depth resolution, delta-doped layers are more useful than sharp interfaces, because the matrix effect and the sputtering rate change can be minimized in profiling thro