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Interpretation of the Parabolic and Nonparabolic Oxidation Behavior of Silicon Oxynitride

✍ Scribed by Jeanette Persson; Per-Olov Käll; Mats Nygren

Book ID
110825732
Publisher
John Wiley and Sons
Year
1992
Tongue
English
Weight
772 KB
Volume
75
Category
Article
ISSN
0002-7820

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