ChemInform Abstract: Oxidation Studies of Silicon Oxynitride Ceramics.
β Scribed by D. MANESSIS; H. DU; R. LARKER
- Publisher
- John Wiley and Sons
- Year
- 2010
- Weight
- 29 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0931-7597
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β¦ Synopsis
Abstract
ChemInform is a weekly Abstracting Service, delivering concise information at a glance that was extracted from about 100 leading journals. To access a ChemInform Abstract of an article which was published elsewhere, please select a βFull Textβ option. The original article is trackable via the βReferencesβ option.
π SIMILAR VOLUMES
## Oxynitridation of Silicon and Postnitridation of Thermal Silicon Oxide in N 2 O in a Vertical Furnace. -In the preparation of gate and tunnel oxides with nitrided interfaces-processing in N 2 O ambient improves the metal oxide semiconductor performance. An optimization of the title process in
## Abstract ChemInform is a weekly Abstracting Service, delivering concise information at a glance that was extracted from about 100 leading journals. To access a ChemInform Abstract of an article which was published elsewhere, please select a βFull Textβ option. The original article is trackable v