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Interferometric laser diode probing of micrometer- and nanometer-scale materials

โœ Scribed by Sherman, Gregory W. ;Bradley, Curtis C.


Book ID
115351060
Publisher
The Optical Society
Year
2003
Tongue
English
Weight
123 KB
Volume
42
Category
Article
ISSN
1559-128X

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## Abstract We studied steep gradients of both chemical composition and residual stress in a Siโ€doped GaAs blocking layer of a laser diode by means of spectrally and spatially resolved cathodoluminescence (CL) spectroscopy. Using a lowโ€energy electron beam as an excitation source for the CL emissio