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Interferometric fabrication of modulated submicrometer gratings in photoresist

✍ Scribed by Ehbets, Peter ;Herzig, Hans Peter ;Nussbaum, Philippe ;Blattner, Peter ;Dändliker, René


Book ID
115344122
Publisher
The Optical Society
Year
1995
Tongue
English
Weight
848 KB
Volume
34
Category
Article
ISSN
1559-128X

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