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Crystallographically limited submicrometer gratings in (100) and (211) silicon

โœ Scribed by Sarathy, J.; Diaz, D. C.; Campbell, J. C.


Book ID
115421160
Publisher
Optical Society of America
Year
1995
Tongue
English
Weight
350 KB
Volume
20
Category
Article
ISSN
0146-9592

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