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Interferometer using a laser pointer for remote microdisplacement measurements

โœ Scribed by Zhong Ming Ming; Low Gin Hin; Gopal M. Hegde

Book ID
110144181
Publisher
SP MAIK Nauka/Interperiodica
Year
2005
Tongue
English
Weight
115 KB
Volume
31
Category
Article
ISSN
1063-7850

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A laser interferometer for measuring str
A laser interferometer for measuring straightness
โœ Shyh-Tsong Lin ๐Ÿ“‚ Article ๐Ÿ“… 2001 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 121 KB

This paper proposes a laser interferometer for determining the straightness of a moving stage. The optical setup is described and the theory is derived. The results show that this interferometer not only overcomes the disadvantages of the conventional interferometers but also provides a higher sensi