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Interfacial layers in Ta2O5 based stacks and constituent depth profiles by spectroscopic ellipsometry

โœ Scribed by Y. Karmakov; A. Paskaleva; E. Atanassova


Book ID
116244988
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
431 KB
Volume
258
Category
Article
ISSN
0169-4332

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