✦ LIBER ✦

Interface structure between polyimide film substrate and copper film prepared by ion beam and vapor deposition (IVD) method

✍ Scribed by Akinori Ebe; Eiji Takahashi; Naoto Kuratani; Satoshi Nishiyama; Osamu Imai; Kiyoshi Ogata; Yuichi Setsuhara; Shoji Miyake

Book ID: 114168597
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 431 KB
Volume: 121
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(96)00697-0

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Improvement of the adhesion to polyimide

Improvement of the adhesion to polyimide substrates of copper films prepared by an ion beam and vapor deposition (IVD) method

✍ Akinori Ebe; Eiji Takahashi; Yasushi Iwamoto; Naoto Kuratani; Satoshi Nishiyama; 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 499 KB

Properties of boron nitride coating film

Properties of boron nitride coating films prepared by the ion beam and vapor deposition method (IVD)

✍ Y. Andoh; K. Ogata; Y. Suzuki; E. Kamijo; M. Satou; F. Fujimoto 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 247 KB

Enhancing adhesion by ion beam-induced a

Enhancing adhesion by ion beam-induced atomic mixing at the interface between copper film and polyimide substrate

✍ S. K. Koh; K. D. Pae; N. G. Stoffel; D. L. Hart 📂 Article 📅 1990 🏛 Society for Plastic Engineers 🌐 English ⚖ 462 KB

## Abstract Ion beam mixing was used to improve the adhesion between deposited Cu film (400 Å) and polyimide (PI) substrate. Ar^+^ ion with the energy levels between 180 and 200 keV, and the dose between 10^14^ to 4 × 10^16^ ions/cm^2^ were used. The surface analyses were carried out by Rutherford

Study on the internal stress in nickel f

Study on the internal stress in nickel films deposited onto silicon substrates by ion beam and vapor deposition (IVD)

✍ Naoto Kuratani; Yasuo Murakami; Osamu Imai; Akinori Ebe; Satoshi Nishiyama; Kiyo 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 350 KB

STEM observation of nano-interface betwe

STEM observation of nano-interface between substrate and DLC film prepared by plasma-based ion implantation and deposition

✍ Y. Oka; M. Nishijima; K. Hiraga; M. Yatsuzuka 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 689 KB

Internal stresses in nickel films prepar

Internal stresses in nickel films prepared by ion beam and vapor deposition

✍ Naoto Kuratani; Yasuo Murakami; Osamu Imai; Akinori Ebe; Satoshi Nishiyama; Kiyo 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 388 KB