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Interface properties in fluorinated (100) and (111)Si/SiO2 MOSFETs

✍ Scribed by A. Balasiński; M.H. Tsai; L. Vishnubhotla; T.P. Ma; H.H. Tseng; P.J. Tobin


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
294 KB
Volume
22
Category
Article
ISSN
0167-9317

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