Intensity analysis of XPS spectra to determine oxide uniformity: Application to SiO2/Si interfaces

✍ Scribed by R.P. Vasquez; F.J. Grunthaner

• Book ID: 118983506
• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 483 KB
• Volume: 99
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/0039-6028(80)90561-0