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Application of high-energy synchrotron-radiation XPS to determine the thickness of SiO2 thin films on Si(100)

✍ Scribed by Hiroyuki Yamamoto; Yuji Baba; Teikichi A. Sasaki


Book ID
116067933
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
324 KB
Volume
349
Category
Article
ISSN
0039-6028

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