Intensity analysis of XPS spectra to determine oxide uniformity: Application to SiO2/Si interfaces

✍ Scribed by R.P. Vasquez; F.J. Grunthaner

• Book ID: 104189019
• Publisher: Elsevier Science
• Year: 1980
• Weight: 54 KB
• Volume: 99
• Category: Article
• ISSN: 0167-2584
• DOI: 10.1016/0167-2584(80)90469-7