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Integrity of ultrathin gate oxides with different oxide thickness, substrate wafers and metallic contaminations

✍ Scribed by R. Hölzl; A. Huber; L. Fabry; K.-J. Range; M. Blietz

Book ID: 106023008
Publisher: Springer
Year: 2001
Tongue: English
Weight: 223 KB
Volume: 72
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s003390000721

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