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Integration of Thin-Film Galfenol With MEMS Cantilevers for Magnetic Actuation

✍ Scribed by Basantkumar, R.R.; Stadler, B.J.H.; Robbins, W.P.; Summers, E.M.

Book ID
114651456
Publisher
IEEE
Year
2006
Tongue
English
Weight
677 KB
Volume
42
Category
Article
ISSN
0018-9464

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✍ Xiao-Hui Xu; Yan Feng; Bao-Qing Li; Jia-Ru Chu πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 747 KB

Bulk PZT thick film actuator integrated with displacement sensor, the so-called self-sensing actuator, is presented in this paper. The PZT film is used as not only an actuating layer but also a displacement sensor, which is achieved by dividing the electrode on the top surface of the PZT film into t