✦ LIBER ✦
[IEEE 2010 Photonics Global Conference - Orchard, Singapore (2010.12.14-2010.12.16)] 2010 Photonics Global Conference - MEMS VOA based on torsional and bending attenuation mechanisms using piezoelectric cantilever integrated with 1×10 PZT thin film actuators
✍ Scribed by Koh, Kah How; Kobayashi, Takeshi; Lee, Chengkuo
- Book ID
- 126735203
- Publisher
- IEEE
- Year
- 2010
- Weight
- 284 KB
- Category
- Article
- ISBN
- 1424498805
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