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Integration of metal insulator metal capacitors (MIM-Caps) with low defectivity into a copper metallization

✍ Scribed by Michael Schrenk; Klaus Koller; Karl-Heinz Allers; Heinrich Körner

Book ID: 104050401
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 416 KB
Volume: 82
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2005.07.074

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