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Integrated optic pressure sensor on silicon substrate

✍ Scribed by Ohkawa, Masashi ;Izutsu, Masayuki ;Sueta, Tadasi


Book ID
115340548
Publisher
The Optical Society
Year
1989
Tongue
English
Weight
521 KB
Volume
28
Category
Article
ISSN
1559-128X

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πŸ“œ SIMILAR VOLUMES


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Silicon optical pressure sensor
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