Imbalanced Mach-Zehnder interferometer integrated in micromachined silicon substrate for pressure sensor

✍ Scribed by Porte, H.; Gorel, V.; Kiryenko, S.; Goedgebuer, J.-P.; Daniau, W.; Blind, P.

• Book ID: 115369542
• Publisher: Optical Society of America
• Year: 1999
• Tongue: English
• Weight: 120 KB
• Volume: 17
• Category: Article
• ISSN: 0733-8724
• DOI: 10.1109/50.744229