๐”– Bobbio Scriptorium
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Integrated Fresnel lens on thermally oxidized silicon substrate

โœ Scribed by Mottier, P. ;Valette, S.


Book ID
115329021
Publisher
The Optical Society
Year
1981
Tongue
English
Weight
658 KB
Volume
20
Category
Article
ISSN
1559-128X

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๐Ÿ“œ SIMILAR VOLUMES


Thermal oxidation of silicon substrates
โœ Masahiro Susa; Kazuhiro Nagata ๐Ÿ“‚ Article ๐Ÿ“… 1991 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 970 KB

A great many studies on the thermal oxidation of silicon substrates have been carried out owing to its industrial importance. In this paper, the conventional studies are overviewed from the point of view of the diffusion of oxygen. First, the mechanism for dry oxidation of silicon has been discusse