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Integrated fabrication of electrostatic microactuator for HDD R/W head positioning

✍ Scribed by J. Chen; Y. Lu; J. P. Yang

Book ID: 106184902
Publisher: Springer-Verlag
Year: 2005
Tongue: English
Weight: 267 KB
Volume: 11
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-005-0531-7

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