✦ LIBER ✦
An electrostatic microactuator using LIGA process for a magnetic head tracking system of hard disk drives
✍ Scribed by S. Nakamura; K. Suzuki; M. Ataka; H. Fujita; S. Basrour; V. Soumann; M. Labachelerie; W. Daniau
- Publisher
- Springer-Verlag
- Year
- 1998
- Tongue
- English
- Weight
- 181 KB
- Volume
- 5
- Category
- Article
- ISSN
- 0946-7076
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