An electron imaging system for the fabrication of integrated circuits : T. W. O'Keeffe, J. Vine and R. M. Handy, Solid-St. Electron. 12 (1969), p. 841

• Publisher: Elsevier Science
• Year: 1970
• Tongue: English
• Weight: 105 KB
• Volume: 9
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(70)90508-1