InP surface properties under ICP plasma etching using mixtures of chlorides and hydrides

✍ Scribed by B. Liu; J.-P. Landesman; J.-L. Leclercq; A. Rhallabi; C. Cardinaud; S. Guilet; F. Pommereau; M. Avella; M.A. González; J. Jiménez

• Book ID: 104064259
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 167 KB
• Volume: 9
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2006.01.064