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Inline Measurement of Adhesion Force Using Electrostatic Actuation and Capacitive Readout

✍ Scribed by Shavezipur, M.; Gou, W.; Fisch, M.; Carraro, C.; Maboudian, R.

Book ID: 118165482
Publisher: IEEE
Year: 2012
Tongue: English
Weight: 394 KB
Volume: 21
Category: Article
ISSN: 1057-7157
DOI: 10.1109/jmems.2012.2190715

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