Nanoscale displacement measurement of electrostatically actuated micro-devices using optical microscopy and digital image correlation

✍ Scribed by Assaf Ya’akobovitz; Slava Krylov; Yael Hanein

• Book ID: 108263049
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 426 KB
• Volume: 162
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/j.sna.2010.05.014