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Inhomogeneous optical SiOxNy thin films prepared by ion assisted deposition

โœ Scribed by H.J. Cho; I.G. Yu; C.K. Hwangbo

Book ID
114168595
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
421 KB
Volume
121
Category
Article
ISSN
0168-583X

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