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Infrared spectroscopy and electrical characterization of phosphorus implanted and annealed silicon layers

✍ Scribed by Antonios Seas; Maria-Elena Eleftheriou; Constantinos Christofides; Charis R. Theocharis


Book ID
113286714
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
709 KB
Volume
103
Category
Article
ISSN
0168-583X

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