Photoluminescence from Er-doped silicon
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A. Hryciw; C. Blois; A. Meldrum; T. Clement; R. DeCorby; Quan Li
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Article
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2006
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Elsevier Science
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English
β 274 KB
Er-doped silicon oxide (SiO:Er) thin films with Er concentrations ranging from 0.04 to $2.5 at.% were deposited on SiO 2 and Si substrates by co-evaporation of SiO and Er 2 O 3 under high vacuum. Electron energy filtered imaging and elemental mapping confirm the presence of amorphous Si nanoclusters