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Infra-red, X-ray photoelectron spectroscopy and electrical studies of r.f. sputtered amorphous silicon carbide films

✍ Scribed by L.J. Han; T.Y. Ong; S. Prakash; L.G. Chua; W.K. Choi; L.S. Tan; F.C. Loh; K.L. Tan


Book ID
114086708
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
336 KB
Volume
343-344
Category
Article
ISSN
0040-6090

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