✦ LIBER ✦
Silicon films deposited from SiCl4 by an r.f. cold plasma technique: X-ray photoelectron spectroscopy and electrical conductivity studies
✍ Scribed by E. Grossman; A. Grill; M. Polak
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 456 KB
- Volume
- 119
- Category
- Article
- ISSN
- 0040-6090
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